The last method of low temperature sterilization for our company to explore is the method of hydrogenperoxide plasma sterilization. The plasma sterilizer use hydrogen peroxide h2o2 as a sterilant to sterilize precise medical devices and instruments which may be changed their properties and appearances underhigh temperature and pressure. Hydrogen peroxide is not a toxic, Powerful oxidizing agent that decomposes in to water and oxygen. The benefit of hydrogen peroxide is environment friendly. It fails to leave harmful residues after plasma phase to the ecosystem and human bodies. Also it has great advantages in sterilizing performance thatcan destroy an extensive variety of pathogens.