Shape Round, Material Teflon KALREZ-SEMICONDUCTOR INDUSTRIES, Brand Omxpare, Inner diameter 30 mm

Semiconductor processing seals kalrez seals for semiconductor processing are field, Proven in the creation of semiconductor chips. They can help extend planned and thereby, Maintenance intervals lower long, Term cost available in, Of ownership a wide range of semiconductor processes. N various fabrication customer evaluations, Kalrez seals exhibited improved lower particle, Mechanical strength generation and Extended lifespan of seals versus in both, Competitive perfluoroelastomers static and dynamic sealing applications. Operational improvements kalrez seals can help improve semiconductor manufacturing offered in multiple options of wafer, Fabricating operations, Including deposition etch ash/strip thermal wet better performance for spansion spansion, The largest provider of flash turned to, Memory solutions dupont for material options that would produce longer seal life with reduced particle generation. High particle count and leaks from seal erosion and compression set caused seal issues in multiple processes. Kalrez 9100 parts exhibited reduced particle generation, Significantly less seal erosion, And provided better elastic recovery characteristics. Kalrez 8002 a clear, Unfilled product for plasma and gas deposition applications like etching, Ashing, And pecvd. It offers excellent mechanical properties and resists dry process chemicals. Kalrez 1050lf a black product for wet process applications where amines are present. It has good mechanical strength, And resists, Thermal stability amines. Kalrez 9100 an amber translucent product for deposition process applications like hdpcvd, Pecvd, And sacvd. Kalrez 9300 a brown product for etch processes, Especially in plasma environments with ions and radicals. Kalrez 9600 a cleaner seal material capable of minimizing chamber contamination and preparation time.